X向量程:100mm
Z向量程:320mm
传感器范围:80μm
测量重复性:±1.5%
线性精度:±3%
测量参数: Ra、Rt、Rp、Rz(jis)、Rz(DIN)、Rz、Rvk、Rv、R3z、Rs、Rsm、Rc、Rsk、Rk、Rmax、Rpk、Mr1、Mr2、Rq、Rku、R△q